Fig.1 Experimental set-up for evaluating the characteristics of the microstructure of a holographic plate.

Fig.2 Use the parameters for qualitative measurement of the quality characteristics of film to adjust the parameters in film fabricating process.

Fig.3 The histogram of (A) a unmodified look up table and (B) a modified look up table.

Fig.4 The image of a film with micro-particle.

Fig.5 The short-axis and long-axis of the profile of a particle.

Fig.6 The measurement of the photoresist thickness corresponding to the resist hickness of about 4.5 m.

Fig.7 The measurements results which are identified on two types of particle.

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