emulsion			measurement result
fabrication method	emulsion	thickness	ATR	TPATR	MTR	RMSTR
spinning 400rpm	photoresist	1.5	0.15	0.16	0.21	0.15
spinning 350rpm	photoresist	2.0	0.10	0.20	0.25	0.17
spinning 300rpm	photoresist	2.1	0.12	0.21	0.25	0.21
spinning 250rpm	photoresist	2.5	0.50	0.51	0.62	0.52
dip-coating	DCG	12	2.4	2.9	3.9	2.7
blade-coating	DCG	15	1.2	1.4	1.5	1.2

Table 1 One example of the measurement results of our system.     nextindexback