The analysis of vibration isolated quality with a modified Michelson set-up has been discussed and demonstrated. This technique provides examination of the tiny vibration values of a vibration isolated system. The fringe shifts and the angular inclination value at the tested stage rotating movement have been shown analytically and experimentally. It also is interesting that this new measurement system used measuring sub-micrometer vibration on the rotating machine.

This work is sponsored by the National Science Council, Taiwan, Republic of China, under grant number NSC-87-2511-S-035-001.

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