Microfabrication
     - Crystal and amorphous silicon; 
     - Isolation layer(SiO2, Si3N4, Sapphire); 
     - Conductive layer(metal films); 
     - Impurity process(diffusion, implantation); 
     - Photolithography; 
     - Patterning(etch process); 
     - Bonding; Dicing; Packaging.
 
 		  
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