|
半導體製程
自動化廠務感測器監控系統
|
•Clean Room
－Temperature, Humidity, Pressure,
Particle.
•DI Supply System
－Resistivity, Flow rate, Particles.
•Gas/Chemical Supply System
－Temperation, Humidity, Impurity,Toxic
gas,
Pressure,
Flow rate.
•Waste/Exhaust System
－PH, Gases. |
|
|
|